Near-Field Scanning Microwave Microscope for Interline Capacitance Characterization of Nanoelectronics Interconnect

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ژورنال

عنوان ژورنال: IEEE Transactions on Microwave Theory and Techniques

سال: 2009

ISSN: 0018-9480,1557-9670

DOI: 10.1109/tmtt.2009.2017352