Near-Field Scanning Microwave Microscope for Interline Capacitance Characterization of Nanoelectronics Interconnect
نویسندگان
چکیده
منابع مشابه
Near-field scanning optical microscope probe analysis.
In this article results of a comparison of two NSOM probe characterization methods are presented. Scanning electron microscopy analysis combined with electromagnetic field modeling using the finite difference in time domain method are compared with measured far-field radiation diagrams of NSOM probes. It is shown that measurement of far-field radiation diagrams can be an efficient tool for dail...
متن کاملThe near-field scanning thermal microscope.
We report on the design, characterization, and performance of a near-field scanning thermal microscope capable to detect thermal heat currents mediated by evanescent thermal electromagnetic fields close to the surface of a sample. The instrument operates in ultrahigh vacuum and retains its scanning tunneling microscope functionality, so that its miniature, micropipette-based thermocouple sensor...
متن کاملScanning Microwave Microscope
Introduction Measuring electromagnetic properties of materials can provide insight into applications in many areas of science and technology, and increasingly, these properties need to be evaluated at the nanometer scale. Since electromagnetic properties, such as the dielectric constant, are ultimately related to a material’s molecular structure, correlating the detailed physical structure of a...
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ژورنال
عنوان ژورنال: IEEE Transactions on Microwave Theory and Techniques
سال: 2009
ISSN: 0018-9480,1557-9670
DOI: 10.1109/tmtt.2009.2017352